Tantalum sputtering target, Tantalum alloy target.

Material: RO5200, RO5400, RO5252(Ta-2.5W), RO5255(Ta-10W)

Size: Circular targets:

Diameter 25mm up to 400mm x Thickness 3mm up to 28mm

Rectangular targets: Thickness 1mm up to 12.7mm x Width up to 600mm x Length up to 2000mm

Purity: >=99.95% or 99.99%

Table 1: Technology parameter